JPS61201342U - - Google Patents
Info
- Publication number
- JPS61201342U JPS61201342U JP8485285U JP8485285U JPS61201342U JP S61201342 U JPS61201342 U JP S61201342U JP 8485285 U JP8485285 U JP 8485285U JP 8485285 U JP8485285 U JP 8485285U JP S61201342 U JPS61201342 U JP S61201342U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- fixed disk
- photoresist
- coming
- escape groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8485285U JPS61201342U (en]) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8485285U JPS61201342U (en]) | 1985-06-05 | 1985-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61201342U true JPS61201342U (en]) | 1986-12-17 |
Family
ID=30634711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8485285U Pending JPS61201342U (en]) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61201342U (en]) |
-
1985
- 1985-06-05 JP JP8485285U patent/JPS61201342U/ja active Pending